ISO 01463-2021.docx

INTERNATIONA1.STANDARDISO1463editionF(Wrth202105Meta1.1.icandoxidecoatings一Measurementofcoatingthickness一Microscopica1.methodReVetementSmGtaHiquesetcouchesd'oxydeMesuragedeVepaisseurderevetementMethodeparcoupemicrographiqueISOR43cgo2i>tE!)O1.SO2021COPYRIGHTPROTECTEDDOCUMENT©ISO2021岫rkdea/山thUcdOthcnviscjft<c三orrtmcehDVBiwixuioiti08phnn11UatiocBhr<1.>hotoc<>p)Mng,ptbcatonpostingontheinternetoranintranet,withoutpriorwrittenpermission.PermissioncanherequestedfromeitherISOattheaddressbe1.oworIS<smemberbodyinthecountryoftherequester.%,tft晒Iandonnet8CH-1214*crnicr,GenevaPhone：M1.22749O1.11Pub1.ishedinSwitzerhndMeta1.1.icandoxidecoatings-MeasurementofcoatingthicknessMicroscopica1.methodWARNINGTheuseofthisdocumentcaninvo1.vehazardousmateria1.s,operationsandequipment.Thisdocumentdoesnotpuporttoaddressa1.1.ofthesafetyprob1.emsassociatedwithitsuse.Itistheresponsibi1.ityofusersofthisdocumenttotakeappropriatemeasurestoensurethesafetyandhea1.thofpersonne1.priortotheapp1.icationofthedocument1 Scope1.ayers,porce1.ainmicroscope.vitreousename1.coatings,bythemicroscopica1.examinationofcross-sections2 Normativereferences3 Termsanddefinitionsnatthefo1.1.owingISOandIECmaintaintermino1.ogica1.databasesJbrJSr1.StandardizaUoaddresses:3.1 IECE1.ectropedia:avai1.ab1.eathttpwww.e1.e<uopedia.og1.oca1.thicknessPrinCiPIe2064:1996,3.41suitab1.etechniquesOfspecimenpo1.ishingandmounted.TheThethicknessofcross-sectioncross-sectionbyQaUSe5andThesetechniques1.esswi1.1.expertencedexperiencedmeta1.1.ographers,butsomeguidanceisgivenin5Factorsre1.atingtomeasurementuncertainty5.1 Surfaceroughnesscross-sectioncou1.dbetooirregu1.artopermitaccuratemeasurement(seeA.6).Thisdocumentspecifiesamethodforthemeasurementofthe1.oca1.thicknessofmeta1.1.iccoatings,oxideusingandoptica1.Therearenonormativereferencesinthisdocument.Forthepurposesofthisdoment,thefo1.1.owingtermsanddefinitionsapp1.y.ISOOn1.inebrowsingp1.atform:avai1.ab1.eathttps:/www.iso.org/obpmeanofthethicknessmeasurements,ofwhichaspecifiednumberismadewithinareferencearea4S0URCEJS0Aportionofgrinding.cutoutetching.mountedthecoatingpreparedismeasuredbymeansofaca1.ibratedsca1.e.NOTEinAnnexAforbefami1.iaroperators.Ifthecoatingoritssubstratehasaroughsurface,oneorbothoftheinterfaees-boundingthecoating5.2 Taperofcross-sectionIfthep1.aneofthecross-sectionisnotperpendicu1.artothep1.aneofthecoating,themeasuredthicknesswi1.1.bethetruethickness,e.g.aninc1.inationof100totheperpendicu1.arwi1.1.contributeauncertainty.S(3EDefOrmfatiOddgti1.噜thetaperofacross-section.WWRWt油gd三RiM>fIteV118W3fbes6ftgEttW三re小wP1三Wganda1.sobyexcessiveabrasionofbritt1.emateria1.sduringpreparationofcross-sections.5.4 RoundingofedgeofcoatingIftheedgeOfthecoatingcross-sectionisrounded,i.e.ifthecoatingcross-sectionisnotcomp1.ete1.yf1.atbptn0Few6hff>thgtitcttw:dfcdtnRbtctbsgH<1.tucraUvopica1.1.EihyfcMM>ding>viMii1.f1.th*gtC3(sedspecimenbeforemounting(seeA.2).5.5 Overp1.atingOverp1.atingofthetestspecimenprotectsthecoatingedgesduringpreparationofcross-sectionsanddverFirmwjiCsnenibrieoiitamthjnkBfneiReInosaiiofmentxoatingmateria1.duringsurfacepreparationfor5.6 EtchingOptimumetchingproducesac1.ear1.ydefinedandnarrowdark1.ineattheinterfaceoftwometa1.s.517essiveS11nehingproducesapoor1.ydefinedorwide1.inethatcanresu1.tinerroneousmeasurementIH赧bperoBSMH墀丽8Q'p1.atiH的也四悌m蝴UngaSW牌照negate”©色师Wb1.创作Sfera1.1.eviatedbyrepeatingthepreparationofthecross-sectionofthecoatedmeta1.unti1.repeatabi1.ityofthethicknessmeasurement(seeA.3andA.5)isobtainedanda1.sobyoverp1.atingwithahardermeta1.5.8 MagnificationForanygivencoatingthickness,measurementuncertaintygenera1.1.yincreaseswithdecreasingmagnification.Themagnificationshou1.dbechosensothatthefie1.dofviewisbetween1,5×and3Xthethickness.5.9 Ca1.ibrationofstagemicrometerAnyuncertaintyinca1.ibrationofthestagemicrometerwi1.1.beref1.ectedinthemeasurementoftheg1.Qmen.Ca1.HMtQcigtiferaceabtenriidrosdepgtanbandsrtijIImeasuringdevice1.1.1 1MicrometereyepieceAfi1.armicrometereyepieceprovidesasatisfactorymeansofmakingthemeasurementofthespecimen.iF0eratornc5iafidBcWt¼e1.beytiecerriuIaecuratecriibthtip<riota<t<dftheahb'epiec<MAssurementxa1.ibrationisRepeatedca1.ibrationsOfbetweenmicrornetereyepiecestagemicrometerexpectcdtheca1.ibrationShan1.eSSSomeforimagemeasurementmicrometereyepieceshaveanon1.inearitythatintroducesanuncertaintyofuptouncertainty,ensurethatthefina1.motionduringa1.ignmentofthehair1.ineisa1.waysmadeinthesame1.1.2 2Digita1.imageprocessingtoComputermeasurementwi1.1.imagecapturingandprocessingadjustmentnowadaysca1.ibrationofart.Simi1.arForadjustment,recordedforeverycombinationmicrometerobjective,bothdirectio11sintermediatethemagnicationsoftware.Usua1.1.ystagemicronWteradjUStnWnt.respectivefunctionrecordedwca1.ibra1.ed'>ndiswithsavcdmpixe1.adjustmenta